Real-time X-ray diffraction imaging for semiconductor wafer metrology and high temperature in situ experiments
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chair:
A. N.
Danilewsky, J. Wittge, A. Hess, A. Cröll, A. Rack, D. Allen, P. J. McNally,
T. dos Santos Rolo, P. Vagovič, T. Baumbach, J. Garagorri, M. R. Elizalde, B.
K. Tanner
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place:
Physica
Status Solidi A 208, 2499-2504
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Date:
2011