Intelligent Real-time MAnipulation of metal nanostructure growth (IRMA)

IRMA seeks to develop effective, non-invasive strategies for manipulating morphology and opto-electronic properties of vapor-deposited Ag nanostructures, such as 3D nanoparticles and ultra-thin continuous layers. The approach relies on selective deployment of additives (i.e., gaseous species and solute metals) to target key nanostructure formation stages, whereby complex dynamic synthesis processes will be studied in real-time by leveraging the strengths of lab-scale in situ probes and synchrotron X-ray tools.

Wafer curvature (stress) measurements combined with X-ray diffraction, X-ray reflectivity and small-angle X-ray scattering will provide insights into the interplay among crystal formation, morphological evolution, and stress development, which will be used to benchmark data from real-time optical and electrical probes. On a grander scale, the fundamental knowledge generated by the IRMA project paves the way toward intelligent in-line control of industrial nanostructure synthesis processes.

Project Partners

Université de Poitiers, Frankreich
Synchrotron SOLEIL, Frankreich

The project is funded by the Deutsche Forschungsgemeinschaft (DFG) under the project number 491224986