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Nanoscience and Materials for Information Technologies

In situ growth, processing & characterization:

  • NANO-Labs, UHV analytics lab and heavy duty diffractometers
  • Labs for laboratory analytics and micro-structuring techniques at KNMF

 

  • Thin film and nanostructure growth technologies (PLD, MBE, Sputtering, MOVPE)
  • Real structure of AIII-BV photonic devices, rare earth films, hard coatings
  • Defect recognition and damage analysis in microelectronic materials, wafers, interconnects,  devices, microsystems during processing and operation